Touchdown and related problems in electrostatic MEMS device equation

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چکیده

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Dynamics and Touchdown in Electrostatic MEMS

Perhaps the most widely known nonlinear phenomena in nanoand microelectromechanical systems is the “pull-in” or “jump-to-contact” instability. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady-state configuration of the device where mechanical members remain separate. This instability affects the design of many devices. It may...

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Analysis of the Dynamics and Touchdown in a Model of Electrostatic MEMS

We study a reaction-diffusion equation in a bounded domain in the plane, which is a mathematical model of an idealized electrostatically actuated microelectromechanical system (MEMS). A relevant feature in these systems is the “pull-in” or “jump-to contact” instability, which arises when applied voltages are increased beyond a critical value. In this situation, there is no longer a steady state...

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Regularized Model of Post-Touchdown Configurations in Electrostatic MEMS: Equilibrium Analysis

In canonical models of Micro-Electro Mechanical Systems (MEMS), an event called touchdown whereby the electrical components of the device come into contact, is characterized by a blow up in the governing equations and a non-physical divergence of the electric field. In the present work, we propose novel regularized governing equations whose solutions remain finite at touchdown and exhibit addit...

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ژورنال

عنوان ژورنال: Nonlinear Differential Equations and Applications NoDEA

سال: 2008

ISSN: 1021-9722,1420-9004

DOI: 10.1007/s00030-008-7081-5